MEMS原型将用作替代时钟源。它与石英晶体不同，因为它是通过静电而不是压电方式激发和感应的。与膨胀或改变形状的石英对应物不同，这些多晶硅谐振器的物理移动方式与音叉振动的方式大致相同。

CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm

  该原型的作用也与目前市场上产品中使用的其他微型机器有些不同——例如压力和加速度传感器——它们是微小的移动齿轮和销钉。

CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm

  通过高倍显微镜观察，MEMS计时设备原型看起来就像一个微型双端音叉。它由两条非常细的细绳或尖齿组成——10根可以装在针头上——平行固定在红细胞大小的致动器框架上。在连续反馈回路（振荡效应）中设置的电压通过执行器框架施加，导致琴弦来回移动。因为它们非常小，所以MEMS振动极快并产生约1MHz的频率。尽管对于系统时钟来说这是一个相对较低的频率，但原型振荡器是第一个在音频范围以上工作的集成振荡器。

CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm

  在桑迪亚制造这些设备的过程似乎能够制造频率高于10MHz的集成振荡器。尽管频率很高，但这些微型机器产生的噪音非常低——主要是由于机械结构与电子设备的集成以及电子电路的设计。

CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm

  这些频率提供了数字电子设备运行所需的恒定定时信号。由于噪声低，信号是恒定的，不会中断，从而提高了准确性。

636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm
636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm

  用作振荡器的音叉形状的微型机器并不新鲜。独特之处在于将MEMS振荡器与集成电路放在同一芯片上。

CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm
CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-5I-20M0000	CTS晶振	CB3LV	20MHz	±25ppm